CRYSTALLINE ALUMINA FILMS PREPARED BY NEBULIZED SPRAY-PYROLYSIS

Authors
MURUGAVEL P ITS B RAJU AR
Citation
P. Murugavel et al., CRYSTALLINE ALUMINA FILMS PREPARED BY NEBULIZED SPRAY-PYROLYSIS, Bulletin of Materials Science, 21(2), 1998, pp. 107-110
Citations number
9
Categorie Soggetti
Material Science
Journal title
Bulletin of Materials Science → ACNP
ISSN journal
02504707
Volume
21
Issue
2
Year of publication
1998
Pages
107 - 110
Database
ISI
SICI code
0250-4707(1998)21:2<107:CAFPBN>2.0.ZU;2-Y
Abstract
Crystalline alumina films have been successfully deposited on Si(100) and amorphous silica substrates by the nebulized spray pyrolysis techn ique. The surface morphology of the films has been studied by various microscopic techniques. The films exhibit satisfactory microhardness a nd frequency independent capacitance.