AFM HELPS ENGINEER LOW-SCATTER THIN-FILMS

Citation
A. Duparre et N. Kaiser, AFM HELPS ENGINEER LOW-SCATTER THIN-FILMS, Laser focus, 34(4), 1998, pp. 147
Citations number
4
Categorie Soggetti
Optics
Journal title
ISSN journal
10438092
Volume
34
Issue
4
Year of publication
1998
Database
ISI
SICI code
1043-8092(1998)34:4<147:AHELT>2.0.ZU;2-I
Abstract
Power use of power-spectral-density measurements made with an atomic f orce microscope can help optimize thin-film coatings for low scatter.