AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING

This paper presents design issues and a theoretical model of electrost atically driven axial-gap polysilicon wobble motors, The motor design benefits from large axial rotor-to-stator overlap and large gear ratio s, and motor designs with rotor radii of 50 and 100 mu m are capable o f generating torques in the nanoNewtonmeter range at high electrostati c fields, Because of the large gear ratio, smaller angular steps and l ower rotational speed are obtained, compared to radial-gap motor desig ns, Aspects like gear ratio, torque generation, excitation schemes and torque coverage, normal forces, friction, rotor kinetics, and dynamic al behavior are addressed. The motor design is compliant to the integr ation of gear linkages with respect to mechanical power transmission.