AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE

This paper presents the fabrication and first performance characterist ics of electrostatically driven axial-gap polysilicon wobble motors, T he fabrication is based on a four-mask process using polysilicon surfa ce-micromachining techniques. Three-twelve-stator-pole wobble motor de signs have been realized with rotor radii of 50 and 100 mu m. Motors h ave been operated successfully at driving voltages as low as 6 V at sp eeds up to 150 rpm, The motor performance is characterized by gear rat io measurements and measuring starting and stopping voltages, Motor li fetimes of several million wobble cycles, comparable to operating time s of several hours, have been obtained.