WIDE-APERTURE SOURCE OF HIGH-INTENSITY GAS ION-BEAMS

Authors
AKSENOV AI BURIMOV NI KIRILLOV AM PANKOVETS NG SHANDAROV SM
Citation
Ai. Aksenov et al., WIDE-APERTURE SOURCE OF HIGH-INTENSITY GAS ION-BEAMS, Instruments and experimental techniques, 41(1), 1998, pp. 105-106
Citations number
7
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
41
Issue
1
Year of publication
1998
Pages
105 - 106
Database
ISI
SICI code
0020-4412(1998)41:1<105:WSOHGI>2.0.ZU;2-X
Abstract
An arc-discharge ion source is described, which is capable of producin g a gas ion beam with a cross-section area of 80 cm(2), an ion energy of less than or equal to 1.5 keV, a beam current density above 1.5 mA/ cm(2), and a nonuniformity of the ion current density distribution acr oss the beam not exceeding 10%. The source was used for the ion beam e tching of various materials; the maximum etching rate was 6-8 mu m/h.