A POWERFUL SOFT-X-RAY SOURCE FOR X-RAY-LITHOGRAPHY BASED ON PLASMA FOCUSING

A source of soft X-ray emission (9-14 Angstrom) based on the miniature 15 kJ plasma focus was developed and tested. The X-ray emission was c hannelled along the chamber axis through an opening in the inner elect rode (anode). A regime with a mean output of more than 100 J per disch arge was found. At a discharge current of 280 kA and repetition rate o f 3.5 Hz achieved by the device, its lifetime was estimated to be 10(7 ) commutations (about a year of continuous operation). A demonstration experiment on irradiation of an X-ray resist is discussed.