A variable-temperature reflectance difference spectroscopy study of Ga
As grown by molecular beam epitaxy at low-temperature GaAs (LT-GaAs) s
hows that the Fermi level is mostly determined by the point defects in
samples annealed at below 600 degrees C and can be shifted by photoqu
enching the defects. The Fermi level is otherwise almost temperature i
ndependent, leading to an estimated width of the defect band of 150 me
V in the as-grown sample, For LT-GaAs annealed at 850 degrees C, the F
ermi level is firmly pinned, most Likely by the As precipitates. (C) 1
998 American Institute of Physics.