DIRECT FABRICATION OF MICRO MESAS BY VUV LASER-ABLATION OF POLYMERS -PMMA (POLYMETHYLMETHACRYLATE)

Authors
LAPCZYNA M STUKE M
Citation
M. Lapczyna et M. Stuke, DIRECT FABRICATION OF MICRO MESAS BY VUV LASER-ABLATION OF POLYMERS -PMMA (POLYMETHYLMETHACRYLATE), Applied physics A: Materials science & processing, 66(4), 1998, pp. 473-475
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
66
Issue
4
Year of publication
1998
Pages
473 - 475
Database
ISI
SICI code
0947-8396(1998)66:4<473:DFOMMB>2.0.ZU;2-3
Abstract
Mesa-like microstructures in PMMA are ablated by VUV laser irradiation at 157 nm using a water-based masking fluid as a contact mask. Smooth structures without diffraction patterns can be generated. Air bubbles , injected into the mask by means of a capillary, offer the possibilit y of creating circular microchambers. The surface roughness of the abl ated areas is below 100 nm. The method does not require complex optica l systems and is suitable for the prototyping of unique design pattern s.