CHARACTERIZATION OF MAGNETRON SPUTTER CNX THIN-FILMS

Carbon nitride thin films were deposited at different substrate temper ature (ST) by using reactive magnetron sputtering in a pure N-2 discha rge, and studied by laser Raman spectroscopy, x-ray photoelectron spec troscopy (XPS), and spectroscopic ellipsometer. The Raman spectra of t he films show that I(D)/I(G) decreased with the increase of ST. The D bandposition shifted towards lower frequency, while the G bandposition shifted towards higher frequency as the ST increased. The XPS data ex hibit that N1s binding states also depend on ST. The optical band gap of the films is found dropped from 0.22 eV to 0.10 eV with the increas e of ST.