W. Hunziker et H. Melchior, LOW-POWER COMPACT 2X2 THERMOOPTICAL SILICA ON SILICON WAVE-GUIDE SWITCH WITH FAST-RESPONSE, IEEE photonics technology letters, 10(5), 1998, pp. 681-683
5-mm-long and 50-mu m-wide thermooptic waveguide 2 x 2 Mach-Zehnder in
terferometer (MZI) switches with multimode interference (MMI) couplers
have been realized in silica-on-silicon. The use of diffused square w
aveguides with a separating trench results in low heating power of 110
mW for pi phase shift and short rise and fall times of 150 and 180 mu
s, respectively.