We have investigated the structural, electrical and optical properties
of thin films of zinc oxide deposited by laser ablation. We find that
even at room temperature the films are c-axis oriented on both crysta
lline and amorphous substrates. The electrical de resistivity is indep
endent of substrate temperature and is about 2-3 m Omega cm(-1). The f
ilms have low absorption coefficient in the visible part of the spectr
um and represent some of the best ZnO films deposited at low temperatu
re. (C) 1997 Elsevier Science S.A.