ON THE CONDUCTION MECHANISM IN PLASMA-POLYMERIZED M-XYLENE THIN

Plasma polymerized m-xylene (PPm-X) thin films were deposited using a capacitively coupled glow discharge reactor. The structural analysis w as done by infrared (IR) spectroscopy. The current-voltage (I-V) chara cteristics of the PPm-X thin films were investigated at different temp eratures and different thicknesses. The IR analysis reveals that the s tructure of the PPm-X thin films is different from that of the monomer liquid m-xylene. The nonlinear I-V characteristics were analyzed foll owing three different mechanisms of carrier conduction. It is seen tha t Poole-Frenkel conduction mechanism is most probable in PPm-X thin fi lms. (C) 1997 Elsevier Science S.A.