N. Matsuura et al., FABRICATION OF CADMIUM-OXIDE THIN-FILMS USING THE LANGMUIR-BLODGETT DEPOSITION TECHNIQUE, Thin solid films, 295(1-2), 1997, pp. 260-265
Thin conducting cadmium oxide (CdO) films were fabricated from Langmui
r-Blodgett Cd arachidate precursors through a combination of low tempe
rature ultra-violet/ozone (UVO) decomposition and annealing treatments
. The decomposition and oxidation of the UVO residue to CdO occurred b
etween 220 to 300 degrees C, and was observed using in-situ laser refl
ectivity and resistivity measurements. The final CdO film resistivitie
s were in the 10(4)-10(5) Omega/square range, depending on annealing c
onditions. Atomic force microscopy revealed nanometre-scale surface ro
ughness in the final film, which most likely resulted in the lower con
ductivity measured in the film as compared to bulk CdO fabrication tec
hniques. (C) 1997 Elsevier Science S.A.