J. Bienstman et al., THE AUTONOMOUS IMPACT RESONATOR - A NEW OPERATING PRINCIPLE FOR A SILICON RESONANT STRAIN-GAUGE, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 40-49
A new oscillation principle for silicon resonators, based on large vib
rational amplitudes and on non-linear effects, is described. Using onl
y a capacitive microbridge, a resistor and a d.c. source, an autonomou
s oscillator can be obtained without the need for an external oscillat
or circuit. An electromechanical model is derived and a general mathem
atical description is given. The autonomous impact oscillator exhibits
periodic as well as chaotic behaviour. The behaviour is simulated and
a stability analysis is presented. Experimental results validate the
model and the proposed oscillation mechanism. (C) 1998 Elsevier Scienc
e S.A. All rights reserved.