SILICON MIRRORS AND MICROMIRROR ARRAYS FOR SPATIAL LASER-BEAM MODULATION

Authors
KURTH S HAHN R KAUFMANN C KEHR K MEHNER J WOLLMANN U DOTZEL W GESSNER T
Citation
S. Kurth et al., SILICON MIRRORS AND MICROMIRROR ARRAYS FOR SPATIAL LASER-BEAM MODULATION, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 76-82
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
66
Issue
1-3
Year of publication
1998
Pages
76 - 82
Database
ISI
SICI code
0924-4247(1998)66:1-3<76:SMAMAF>2.0.ZU;2-8
Abstract
This contribution deals with the design, technology and experimental i nvestigations of mirrors and micromirror arrays made of monocrystallin e silicon. Electrostatically operated two-directionally defecting mirr ors and mirror arrays for continuous scanning with working frequencies between several 100 Hz and 200 kHz are presented. The modified BESOI technology used and the experimental-data-based method to improve the accuracy of model parameters for simulations and to determine the cros s-coupling between array cells are new in the held of micromechanics. Furthermore, results of application-related experiments of laser proje ction are given. (C) 1998 Elsevier Science S.A. All rights reserved.