GAS SPECTROMETRY BASED ON PYROELECTRIC THIN-FILM ARRAYS INTEGRATED ONSILICON

Authors
WILLING B KOHLI M MURALT P SETTER N OEHLER O
Citation
B. Willing et al., GAS SPECTROMETRY BASED ON PYROELECTRIC THIN-FILM ARRAYS INTEGRATED ONSILICON, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 109-113
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
66
Issue
1-3
Year of publication
1998
Pages
109 - 113
Database
ISI
SICI code
0924-4247(1998)66:1-3<109:GSBOPT>2.0.ZU;2-7
Abstract
We report on a novel gas spectrometry technique using pyroelectric thi n-him arrays. The 1 x 50 element arrays of PZT are integrated onto sil icon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current response s in defined frequency ranges. Mounting the array as a detector in a c ommercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 E lsevier Science S.A. All rights reserved.