ERROR ANALYSIS OF MATERIAL PARAMETER DETERMINATION WITH QUARTZ-CRYSTAL RESONATORS

Authors
LUCKLUM R BEHLING C HAUPTMANN P CERNOSEK RW MARTIN SJ
Citation
R. Lucklum et al., ERROR ANALYSIS OF MATERIAL PARAMETER DETERMINATION WITH QUARTZ-CRYSTAL RESONATORS, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 184-192
Citations number
15
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
66
Issue
1-3
Year of publication
1998
Pages
184 - 192
Database
ISI
SICI code
0924-4247(1998)66:1-3<184:EAOMPD>2.0.ZU;2-B
Abstract
The application of quartz-crystal resonators for materials science is based on the dependence of acoustic-wave propagation on the film shear modulus and density. In contrast to the well-known chemical-sensor ap plications, the shear modulus determination of a thin film needs a com plete electrical impedance (or admittance) analysis and a complex fitt ing procedure of the measured responses. This contribution concentrate s on different error sources in the procedure to deter-mine shear para meters. (C) 1998 Elsevier Science S.A. All rights reserved.