DENUDED ZONE THICKNESS FROM SURFACE PHOTOVOLTAGE MEASUREMENTS - COMPARISON WITH MICROSCOPY TECHNIQUES

A method for measuring denuded zone depth from lifetime measurements i s proposed and compared to observations by microscopy techniques. The surface photovoltage (SPV) method is chosen for measuring lifetime, as it is found to be extremely sensitive to oxygen precipitation. SPV es timates of denuded zone depth are compared to observations by microsco py techniques, such as selective etching and inspections by a scanning electron microscope or an atomic force microscope, and analysis by tr ansmission electron microscopy. SPV estimates agree with microscopy in spection, provided defect density is high enough to allow a denuded zo ne to be identified.