J. Lee et al., ROTATING-COMPENSATOR MULTICHANNEL ELLIPSOMETRY FOR CHARACTERIZATION OF THE EVOLUTION OF NONUNIFORMITIES IN DIAMOND THIN-FILM GROWTH, Applied physics letters, 72(8), 1998, pp. 900-902
A multichannel spectroscopic ellipsometer based on the rotating-compen
sator principle has been applied to obtain the evolution of spectra (1
.5-4.0 eV) in the normalized Stokes vector of the light beam reflected
from the surface of a nanocrystalline diamond film during growth. Spe
ctra in the ellipsometry angles (psi, Delta) provide the, time evoluti
on of the microstructure and optical properties of the film in thin la
yers, whereas the spectra in the degree of polarization provide the ti
me evolution of nonuniformities in the growth process attributed to li
ght scattering by diamond nuclei in the initial stage of growth and to
thickness gradients over the probed area in thicker layers. (C) 1998
American Institute of Physics.