Complex topological features such as rectangular voids and step inclus
ions that were seen in secondary electron micrographs of Co films grow
n on Cu(100) at room temperature were reproduced in Monte Carlo simula
tions in the presence of step bands. Lowered activation energies at de
fects such as steps, kinks, and vacancies enhance step edge restructur
ing during growth and upon annealing, This results in features such as
faceted step edges, rectangular pits, incorporation of Co into terrac
es, surface alloying, and surface segregation. Simulated growth struct
ures are directly compared with those observed in an ultrahigh vacuum
scanning transmission electron microscope. (C) 1998 American Institute
of Physics.