R. Pal et al., DOUBLE-CRYSTAL X-RAY-DIFFRACTION STUDIES ON CHLORIDE-VPE GROWN GAXIN1-XAS LAYERS WITH DIFFERENT GA-TO-IN RATIO, Materials research bulletin, 32(5), 1997, pp. 589-594
In this paper we present the results of the growth of GaxIn1-xAs epila
yers using Ga-ln alloy sources by chloride vapor phase epitaxial techn
ique. The amount of indium incorporated in the epilayers with alloy so
urce composition ranging from 3 to 12 atomic percentage (at%) of Ga is
studied. Double crystal X-ray diffractometry (DXRD) has been used to
characterize the epitaxial layers. Copyright (C) 1997 Elsevier Science
Ltd.