INTERFACE FORMATION BETWEEN ULTRATHIN FILMS OF TITANIUM AND (0001)SAPPHIRE SUBSTRATES

The growth of ultrathin films of titanium (less than or equal to 2 mon olayers) on the (0001) plane of sapphire at room temperature was inves tigated by in-situ Auger electron spectroscopy. Quantification of expe rimental measurements showed that the interface between titanium and s apphire was composed of a suboxide of titanium and partially reduced a luminium oxide. interface formation starred with the appearance of a T i2O3-type phase, which led to pure titanium with increasing film thick ness. (C) 1998 Elsevier Science B.V.