WIDE AREA MAPPING OF UNEVEN SPECIMENS IN AN ELECTRON-PROBE X-RAY MICROANALYZER WITH WAVELENGTH DISPERSIVE SPECTROMETERS

Guide Net Mapping method in an electron probe X-ray microanalyser (EPM A) by stage-scan developed by the authors enables analysis of the elem ental distributions for an uneven specimen surface over a wide area. P articularly, the use of the stage-scan mode in submicron stepping enab les precise elemental mapping analysis in the medium magnification ran ge without defocusing of the electron probe and deviation from the geo metrical condition of Bragg reflection in the probe-scan. Applications of this technique to convex and fractured surfaces are presented, dem onstrating the usefulness of this method for an EPMA equipped with wav elength dispersive spectrometers (WDS). The relationship between a spe cimen height and X-ray intensity is also discussed.