COMBINATORIAL SYNTHESIS AND HIGH-THROUGHPUT EVALUATION OF FERROELECTRIC DIELECTRIC THIN-FILM LIBRARIES FOR MICROWAVE APPLICATIONS/

A library of 256 differently doped thin films of (BaxSr1-x)TiO3 (where 0.5<x<1.0) was generated on a 1 in.x1 in. LaAlO3 substrate using mult istep thin-film deposition techniques together with a quaternary maski ng strategy. Appropriate postannealing processing afforded high-qualit y epitaxial thin films. The microwave properties, i.e., dielectric con stant and loss tangent, of samples in the library were characterized w ith a scanning-tip microwave near-field microscope at 1 GHz, and the r esults were found to be consistent with measurements made with interdi gital electrodes. Specific dopants were found to significantly affect the dielectric constant and tangent loss. Tungsten, in particular, red uces the tangent loss. (C) 1998 American Institute of Physics.