TRADEOFFS IN MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM MATERIALS

To build three-dimensional micro-opto-electro-mechanical systems (MOEM S), new materials have to be designed. However, increased manufacturab ility results generally in modified/degraded optical, mechanical, and electrical characteristics. The paper presents a detailed analysis of p + silicon as an opto-electro-mechanical material for microresonators , and gives some hints on the problems associated with the use of low- temperature dielectric in electrostatic microactuators. All the releva nt parameters of p + silicon are experimentally determined and process recommendations allowing improved quality are formulated. Charge inje ction and trapping in low-temperature dielectric are analyzed and thei r impact on the behavior of the electrostatic actuators evaluated. (C) 1997 Society of Photo-Optical Instrumentation Engineers.