MICROMACHINED ELECTROMAGNETIC SCANNING MIRRORS

Authors
MILLER RA TAI YC
Citation
Ra. Miller et Yc. Tai, MICROMACHINED ELECTROMAGNETIC SCANNING MIRRORS, Optical engineering, 36(5), 1997, pp. 1399-1407
Citations number
6
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
36
Issue
5
Year of publication
1997
Pages
1399 - 1407
Database
ISI
SICI code
0091-3286(1997)36:5<1399:MESM>2.0.ZU;2-E
Abstract
We report a new magnetic MEMS technology that enables many electromagn etic MEMS devices. This new technology combines magnetic thin films an d silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of deliveri ng deflection angles exceeding 60 deg. Details include the design, fab rication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved. (C) 1997 Society of Photo-Opt ical Instrumentation Engineers.