LOW-K DIELECTRIC MATERIALS TARGET SUB-0.18-MU-M IC MANUFACTURING

Authors
ENGELKE R
Citation
R. Engelke, LOW-K DIELECTRIC MATERIALS TARGET SUB-0.18-MU-M IC MANUFACTURING, Electronic design, 46(9), 1998, pp. 30-30
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronic design → ACNP
ISSN journal
00134872
Volume
46
Issue
9
Year of publication
1998
Pages
30 - 30
Database
ISI
SICI code
0013-4872(1998)46:9<30:LDMTSI>2.0.ZU;2-U