EFFECTS OF ALCOHOL ADDITION ON THE DEPOSITION OF DIAMOND THICK-FILMS BY DC PLASMA CHEMICAL-VAPOR-DEPOSITION METHOD

Authors
BAI Y JIANG Z WANG C JIN Z LU X ZOU G
Citation
Y. Bai et al., EFFECTS OF ALCOHOL ADDITION ON THE DEPOSITION OF DIAMOND THICK-FILMS BY DC PLASMA CHEMICAL-VAPOR-DEPOSITION METHOD, Chinese Physics Letters, 15(3), 1998, pp. 228-229
Citations number
14
Categorie Soggetti
Physics
Journal title
Chinese Physics Letters → ACNP
ISSN journal
0256307X
Volume
15
Issue
3
Year of publication
1998
Pages
228 - 229
Database
ISI
SICI code
0256-307X(1998)15:3<228:EOAAOT>2.0.ZU;2-I
Abstract
Diamond films have been deposited by de plasma chemical vapor depositi on method. The addition of alcohol in the resource gas largely increas es the deposition rate. The effects of alcohol addition on deposition rate and film quality are analyzed by scanning electron microscopy and Raman spectrometry. The mechanism of experimental phenomena is discus sed.