A resonant-cavity ph photodiode with two quantum dot absorbing regions
is described. Each absorbing region consists of a stack of five self-
assembled. quantum-dot layers, that are Formed by the deposition of si
x monolayers of In0.5Ga0.5As, with GaAs spacer layers. To optimise the
responsivity, the quantum dot stacks are placed at the antinodes of t
he cavity. The peak efficiency is 65% at 1.06 mu m with a spectral ban
dwidth of 1.3 nm.