PIEZOELECTRIC KNBO3 FILMS FOR SAW DEVICE APPLICATIONS

Authors
YAMANOUCHI K ODAGAWA H KOJIMA T ONOE A YOSHIDA A CHIKUMA K
Citation
K. Yamanouchi et al., PIEZOELECTRIC KNBO3 FILMS FOR SAW DEVICE APPLICATIONS, Electronics Letters, 34(7), 1998, pp. 702-703
Citations number
2
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
34
Issue
7
Year of publication
1998
Pages
702 - 703
Database
ISI
SICI code
0013-5194(1998)34:7<702:PKFFSD>2.0.ZU;2-2
Abstract
KNbO3 films have been deposited on STO (SrTiO3) substrate using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabri cate SAW devices. The experimental result show electromechanical coupl ing coefficients (K-2) of 0.021 at the centre frequency of 960 MHz and lambda/h = 0.24 (lambda = SAW wavelength. h = KNbO3 film thickness). These values are in fairly good agreement with theoretical values calc ulated using the piezoelectric constants of single crystals.