GROWTH AND CHARACTERIZATION OF BORON-NITRIDE FILMS - LAYER SEQUENCE AND PHASE IDENTIFICATION

Boron nitride films were deposited using ion beam assisted deposition and examined with polarised infrared reflection spectroscopy. Using th is technique, in addition to the cubic phase, two different non-cubic modifications, layered anisotropic and amorphous, can be distinguished . Comparison of the spectra of c-BN containing films with model calcul ations fields a depth resolved determination of the Various layers and the cubic content of the top layer. Further insights into the c-BN gr owth process, in particular of the alteration mechanism between h-BN a nd c-BN, can be obtained, in contrast to the established infrared peak ratio. (C) 1997 Elsevier Science S.A.