USE OF DIAMOND-LIKE CARBON-FILMS IN X-RAY OPTICS

The possibility to use multilayer structures based entirely on carbon films as reflecting coatings for S-ray optics elements is analyzed. Th e structures grown by plasma deposition technique contained up to 100 superthin supersmooth layers. It is shown that the X-ray interference can be observed in such structures. Parameters of multilayer structure s consisting of superthin carbon layers were calculated fur various wa velengths in the soft X-ray range. It is shown that the reflection coe fficient of such structures is comparable to that of traditional Me/Me , Me/Si, and Me/C X-ray mirrors but the resolution is greater by a fac tor of 2-3. Samples of X-ray mirrors were made and their characteristi cs measured. (C) 1997 Elsevier Science S.A.