CHEMICAL MICROANALYSIS BY SELECTED-AREA ESCA USING AN ELECTRON-ENERGYFILTER IN A PHOTOEMISSION MICROSCOPE

We present a new and simple device for microspectroscopy being indepen dent of the mode of electron-excitation. Micro-Xray photoelectron spec troscopy, electron-induced Anger-spectroscopy, as well as local energy -loss spectroscopy were used to investigate metal-adsorption on silico n. This new approach employs a non-imaging electron energy analyser at tached to a new-generation photoemission electron microscope with inte gral microarea selector. Photoelectron microspectroscopy was performed using the direct beam of an undulator (U2 at BESSY) being monochromat ised and focused by means of multilayer optics at hv = 95 eV. Similarl y, local Auger-electron and EELS spectra have been taken using a simpl e electron gun for the excitation. The chemical compositions of inhomo genities in thin layers of indium on silicon and the local state of ox idation of a structured Pt-Co multilayer have been determined. (C) 199 8 Elsevier Science B.V.