LOW-PRESSURE POLYMER PRECURSOR PROCESS FOR SYNTHESIS OF HARD GLASSY-CARBON AND DIAMOND FILMS

Synthesis of hard carbon and diamond films at low pressure using polym er as a precursor (LPPP) is presented, The polymer [C6H5C](n), (phenyl carbyne) consists of randomly constructed rigid network of tetrahedral phenylcarbyue units, which is soluble in organic solvents (tetrahydro furan, benzene, etc.), The solution can be applied to various substrat es by the spinning, dipping or draining, resulting in a polymer film w hich can cover complex shapes with large area. The polymer film can be treated by using either the thermal method or plasma at a low pressur e to synthesize hard glassy carbon or diamond films. Under heat treatm ent, the polymer is converted into glassy carbon, whilst under plasma treatment, crystalline diamond call be grown. The glassy carbon and di amond films were characterized by scanning electron microscopy (SEM), Raman spectroscopy and X-ray diffraction(XRD). (C) 1997 Elsevier Scien ce S.A.