FORMATION OF NANOCRYSTALLINE DIAMOND BY HYDROCARBON PLASMA BEAM DEPOSITION

Citation
S. Sattel et al., FORMATION OF NANOCRYSTALLINE DIAMOND BY HYDROCARBON PLASMA BEAM DEPOSITION, DIAMOND AND RELATED MATERIALS, 6(2-4), 1997, pp. 255-260
Citations number
31
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
6
Issue
2-4
Year of publication
1997
Pages
255 - 260
Database
ISI
SICI code
0925-9635(1997)6:2-4<255:FONDBH>2.0.ZU;2-A
Abstract
Diamond crystallites up to 40 nm in size have been grown from a highly ionised plasma beam of acetylene for ion energies close to 100 eV per C atom and substrate temperatures above 450 degrees C. This shows tha t diamond can be grown by physical vapour deposition from an ion-rich plasma as well as by chemical vapour deposition from a radical-rich pl asma. The formation mechanism is argued to be one of nucleation and gr owth rather than a stress-induced transformation from graphite. (C) 19 97 Elsevier Science S.A.