AN ANALYSIS AREA REDUCTION METHOD FOR THE SIMULATION OF DOPANT AND POINT-DEFECT PAIR DIFFUSION

This paper describes a new boundary condition which facilitates the an alysis area reduction in the simulation of dopant and point-defect pai r diffusion. Effective effluent velocity of the point-defect at the bo ttom of the analysis region is approximately evaluated in terms of rat ios of the fundamental solution of the point-defect diffusion equation and its spatial derivative. By means of this method, the analysis dep th of the order of 10 similar to 100 mu m which was necessary in the c onventional simulation can be diminished to the order of 1 mu m.