The structural characteristics of diamond films grown by hot-filament
CVD on silica glass plates, preliminarily modified with different surf
ace treatment, have been investigated by RHEED, SEM, and Raman spectro
scopy. The modifications of the silica glass surfaces were obtained in
three different ways: (]) high-power sonication in diamond dust suspe
nsion; (2) e-beam irradiation for production of amorphous carbon surfa
ce layers, (3) exposition to glow-discharge for production of diamond-
like surface layers. The analyses results are here discussed with refe
rence to the structures produced at the substrate surface. (C) 1997 El
sevier Science S.A.