X-ray photoelectron diffraction is used to investigate the epitaxial g
rowth of thin high quality Ge films on Si(111). Several Ge films have
been prepared with varying coverages with and without Sb terminating t
he interface towards the vacuum. The measured photoelectron pattern fo
r monolayer Ge films exhibits only intralayer diffraction maxima due t
o the double layers formed by the Ge diamond structure. For thicker fi
lms interlayer scattering between two adjacent layers can be observed
as well.