Rhodium particles were vapor-deposited on (-1012) alpha-alumina and po
lycrystalline gamma-alumina substrates. Variations of morphological pa
rameters during the growth and/or thermal annealing in vacuum, oxygen
and CO atmosphere have been investigated by means of static SIMS and X
PS, The ratios of Rh/substrate ion species and the Rh 3d electron bind
ing energy variations indicated changes in metal coverage given by par
ticle size and dispersion variations. The heating of as-deposited part
icles in vacuum led to the particle coalescence. On the other hand the
oxygen interactions with particles gave an increase of particle dispe
rsion.