Three-dimensional Pd particles were prepared by heteroepitaxial growth
on NaCl (001) and alpha-Al2O3 (0001) substrates. During the depositio
n the particle structure and orientation were characterized by reflect
ion high energy electron diffraction. It was shown that the particle e
pitaxial planes conserved the substrate surface symmetry - hexagonal o
r cubic. A CCD camera and a computer data treatment system were used f
or precise investigation of lattice parameter variation given by the p
article interaction with the substrates. It was found that generally t
he lattice parameter parallel to the substrate remained constant due t
o the particle accommodation to the substrate while the perpendicular
lattice parameter varied with particle size. Particle size was investi
gated by transmission electron microscopy.