C. Warns et al., TRANSMISSION-LINES AND PASSIVE ELEMENTS FOR MULTILAYER COPLANAR CIRCUITS ON SILICON, IEEE transactions on microwave theory and techniques, 46(5), 1998, pp. 616-622
In this paper, propagation properties of both standard and multilayer
coplanar lines on different types of silicon substrates, as well as a
number of quasi-lumped and stub-type circuit elements, are investigate
d, For the transmission lines, emphasis is placed on losses, As exampl
es for circuit elements, a lumped pal allel resonator and a high-low i
mpedance low-pass Rites are demonstrated.