A state-of-the-art very low phase noise integrated hybrid dielectric r
esonator oscillator (DRO) working at 6.7 GHz has been designed and fab
ricated using a self-aligned InGaP/GaAs HBT as the active device. Very
low PM noise has been experimentally obtained: -124 dBc/Hz at 10 kHz
off-carrier. This result is compared with other silicon oscillator cir
cuits fabricated with a similar topology. At least a 12 dB improvement
for the HBT technology is observed.