COMPACT 600-W KRF LASER

An analysis is made of the results of an experimental investigation of a high-power electric-discharge KrF laser with UV preionisation. It i s shown that the average output power of the laser increases with incr ease in the pulse repetition rate up to 620 Hz, at which the maximum ( for the investigated class of laser) average power of 630 W is reached . The results demonstrate a realistic promise of constructing an indus trial KrF laser which has a stabilised output power of 300-500 W. This laser can operate continuously when the stabilised average output pow er is 300 W: there is no need to replace the gaseous mixture for 8 h ( 12 x 10(6) pulses). The pulse-to-pulse instability of lasing is then s imilar to 2%.