INTERFEROMETRIC MONITORING OF SURFACE SHAPING PROCESSES IN MICROLENSES PRODUCED BY MELTING PHOTORESIST

Authors
MANCEBO T BARA S
Citation
T. Mancebo et S. Bara, INTERFEROMETRIC MONITORING OF SURFACE SHAPING PROCESSES IN MICROLENSES PRODUCED BY MELTING PHOTORESIST, J. mod. opt., 45(5), 1998, pp. 1029-1037
Citations number
23
Categorie Soggetti
Optics
Journal title
J. mod. opt. → ACNP
ISSN journal
09500340
Volume
45
Issue
5
Year of publication
1998
Pages
1029 - 1037
Database
ISI
SICI code
0950-0340(1998)45:5<1029:IMOSSP>2.0.ZU;2-2
Abstract
The gradual deformation of a melted photoresist pre-form as it changes to the final microlens surface shape is monitored by an adapted Mach- Zehnder interferometer. This set-up makes it possible to record a cont inuous set of interferograms from which the microlens surface evolutio n can be determined. The loss of volume produced in the first steps of melting as well as the progressive changes in curvature and spherical aberration of the refracted wave front are evaluated.