A PLASMA SOURCE BASED ON MICROWAVE-DISCHARGE WITH ELECTRON-CYCLOTRON-RESONANCE

Authors
ANDREEV YA ZAKHAROV AN KLIMOV AI KOSHELEV VI PETKUN AA SOCHUGOV NS SUKHUSHIN KN
Citation
Ya. Andreev et al., A PLASMA SOURCE BASED ON MICROWAVE-DISCHARGE WITH ELECTRON-CYCLOTRON-RESONANCE, Instruments and experimental techniques, 40(1), 1997, pp. 97-99
Citations number
6
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
40
Issue
1
Year of publication
1997
Pages
97 - 99
Database
ISI
SICI code
0020-4412(1997)40:1<97:APSBOM>2.0.ZU;2-7
Abstract
A plasma source with a microwave generator based on an 800-W magnetron is described. Through optimization of the magnetic system and selecti on of the working-gas pressure, the magnetic field, and the microwave power, regimes with a plasma concentration of congruent to 10(10) cm(- 3) with a nonuniformity of +/-5% at a beam diameter of 150-200 mm were obtained.