In0.5Ga0.5P grown on GaAs substrates with different tilting angles by
solid source molecular beam epitaxy (SSMBE) is studied. The results sh
owed that a weak ordering effect still exists in SSMBE grown epilayers
with tilted substrates. However, the ordering effect can be drastical
ly reduced by growing In0.5Ga0.5P on a 15 degrees tilted substrate wit
h an InAlP/InGaP superlattices (SL) buffer layer. The In0.5Ga0.5P epil
ayer grown by this method showed a peak photoluminescence (PL) energy
of similar to 1.91 eV at room temperature, which is similar to the rep
orted value for a fully disordered sample. The intensity of the orderi
ng effect is characterized by polarized PL spectroscopy, and the reduc
tion in the ordering intensity is attributed to the elimination of ini
tial surface strain by the SL buffer layer.