FLEXURAL PLATE WAVE RESONATOR EXCITED WITH LORENTZ FORCES

A flexural plate wave resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lore ntz forces generated between alternating surface currents and a static in-plane magnetic field. Preferential coupling to a particular membra ne mode was achieved by positioning current lines along longitudinal m ode antinodes. An equivalent-circuit model was derived which character izes the input impedance of a one-port device and the transmission res ponse of a two-port device over a range of frequencies near a single m embrane resonance. Experiments were performed to characterize the devi ce's response to changes in de magnetic held strength, ambient gas com position, gas pressure, and input power.