GROWTH OF ZNO THIN-FILMS ON INTERDIGITAL TRANSDUCER CORNING-7059 GLASS SUBSTRATES BY 2-STEP FABRICATION METHODS FOR SURFACE-ACOUSTIC-WAVE APPLICATIONS

ZnO films were grown on interdigital transducer (IDT)/Corning 7059 gla ss substrates by RF planar magnetron sputtering using two-step fabrica tion methods for surface acoustic wave (SAW) applications. The crystal line structure of the as-deposited ZnO films was characterized by x-ra y diffraction (XRD) and x-ray rocking curve analysis. The SAW properti es, including coupling coefficient and insertion loss, were evaluated and compared with the theoretical results, ZnO films deposited by the two-step fabrication method exhibited a lower insertion loss and a clo ser agreement between the experimental coupling coefficients and the c orresponding theoretical values in comparison with films deposited by the one-step fabrication method. The results could be useful in the de sign of high-coupling low-loss SAW devices.