LOW-LOSS OPTICAL WAVE-GUIDE ON STANDARD SOI SIMOX SUBSTRATE/

Authors
LAYADI A VONSOVICI A OROBTCHOUK R PASCAL D KOSTER A
Citation
A. Layadi et al., LOW-LOSS OPTICAL WAVE-GUIDE ON STANDARD SOI SIMOX SUBSTRATE/, Optics communications, 146(1-6), 1998, pp. 31-33
Citations number
10
Categorie Soggetti
Optics
Journal title
Optics communications → ACNP
ISSN journal
00304018
Volume
146
Issue
1-6
Year of publication
1998
Pages
31 - 33
Database
ISI
SICI code
0030-4018(1998)146:1-6<31:LOWOSS>2.0.ZU;2-H
Abstract
Propagation loss measurements are reported for silicon waveguides form ed by the thin silicon film of standard SIMOX substrate. Values very c lose to the theoretical limit associated with leakage towards the subs trate are obtained when a high quality interface between the silicon f ilm and the passivation layer is achieved. (C) 1998 Elsevier Science B .V.