Using numerical simulation techniques, the passivation effect of a sil
icon dioxide film under the back surface of a crystalline silicon sola
r cell was studied and the effect in a practical cell was evaluated. T
he calculation result showed that the oxide passivation technique enha
nces cell performance well when the surface recombination velocity on
the rear surface of the p-type substrate under the silicon dioxide pas
sivation film is below 10(2)cm/s. The recombination velocity on the re
ar surface of the high conversion efficiency single crystalline silico
n solar cell was evaluated at a low value of 10(2)cm/s. Since the calc
ulation parameters can cooperate with the characteristics of the pract
ical device, this numerical simulation is a very effective tool to eva
luate the practical device parameters.